Full-color images produced by white-light interferometry
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United States of America Patent
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Mar 8, 2016
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Jun 2, 2014
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Jun 2, 2014
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Abstract
A true-color image of a sample is obtained from interference data captured with a color camera. The irradiance of each color on the respective photo-sensor represents the sum of DC components received from the object and the reference surface and a modulated interference component. The color is determined at each pixel by removing the interference component and the reference-surface component from the irradiance data. The color map so derived is then combined with the height map produced with the same data to yield a true-color 3D map of the sample.
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