Non-contact magnetic drive assembly with mechanical stop elements

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United States of America Patent

PATENT NO 9281231
APP PUB NO 20130095973A1
SERIAL NO

13649703

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Abstract

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A non-contact magnetic drive assembly with mechanical stop elements for a vacuum deposition system employing a lift-off process having a HULA configuration featuring a plurality of magnets coupled in an annular orientation to a central ring and an orbital ring, each magnet of the orbital ring becomes superposed with a magnet of the central ring as the orbital ring rotates, and a central drive component driving either the central ring, the orbital ring around the central ring or both simultaneously, the central drive component provides a rotational speed allowing non-contact, magnetic drive rotation of the orbital ring around the central ring until a difference between a magnetic drive torque of the superposed magnets and the rotational speed of the central drive component causes the superposed magnets to decouple enabling mechanical drive rotation by interactive contact between a plurality of central ring teeth and a plurality of orbital ring.

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Patent Owner(s)

Patent OwnerAddress
FERROTEC (USA) CORPORATION3945 FREEDOM CIRCLE SUITE 450 SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kroneberger, Cris Livermore, US 6 423
Patel, Bharatkumar Fremont, US 14 919

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