Acceleration sensor structure and use thereof
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United States of America Patent
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Mar 8, 2016
Grant Date -
Aug 1, 2013
app pub date -
Jan 11, 2013
filing date -
Jan 12, 2012
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Abstract
A MEMS-sensor structure comprising first means and second means coupled for double differential detection and positioned symmetrically to provide quantities for the double differential detection in a phase shift. If the sensor deforms, due to a specifically symmetric positioning of the first and second means, the effect of the displacement is at least partly eliminated.
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