Receiving device for receiving semiconductor substrates

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9278433
APP PUB NO 20120146273A1
SERIAL NO

13138902

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A workholding fixture for holding flat semiconductor substrates with

    a carrier,a holding body which is fixed or which can be fixed on the carrier with a holding side which faces away from the carrier andat least one negative pressure channel which penetrates the holding body with one suction end on the holding side, the holding side having a defined suction structure of soft material.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
EV GROUP GMBH4782 ST FLORIAN AM INN

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Burggraf, Jürgen Schärding/Inn, AT 13 65
Burgstaller, Daniel Neuhofen/Innkreis, AT 6 37
Pargfrieder, Stefan Reichenau, AT 3 9
Tiefenböck, Herbert Andorf, AT 3 14

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
11.5 Year Payment $7400.00 $3700.00 $1850.00 Sep 8, 2027
Fee Large entity fee small entity fee micro entity fee
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00