Multi-dopant permeation tube
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United States of America Patent
Stats
-
Mar 1, 2016
Grant Date -
Jun 6, 2013
app pub date -
May 22, 2012
filing date -
May 27, 2011
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Aspects and embodiments of the present invention are directed to spectrometry systems and for apparatus and methods for delivering dopants to same. In one example, there is provided a dopant delivery device configured to supply dopants to a spectrometry system comprising a tube including a first chamber and a second chamber, a first dopant source included in the first chamber, and a second dopant source included in the second chamber.
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Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- H01J Class
- 20.76 % this patent is cited more than
- 9 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Sep 1, 2027 |
