Particle beam device and method for processing and/or analyzing a sample
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Sep 27, 2016
Grant Date -
Aug 16, 2012
app pub date -
Jan 6, 2012
filing date -
Jan 6, 2012
priority date (Note) -
Withdrawn
status (Latency Note)
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Abstract
A particle beam device and method for processing and/or for analyzing a sample are provided. A sample carrier is arranged at a first position, in which a sample surface is oriented parallel to a first beam axis of a first particle beam column. The sample carrier is rotatable from the first position into a second position, in which the sample surface is oriented perpendicular to a second beam axis of a second particle beam column. The first and second beam axes intersect at a coincidence point. In the first position a distance between the coincidence point and the first particle beam column is greater than a distance between the sample surface and the first particle beam column. In the second position a distance between the coincidence point and the second particle beam column is greater than a distance between the sample surface and the second particle beam column.
First Claim
Other Claims data not available
Family
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International Classification(s)
- 2012 Application Filing Year
- H01J Class
- 2054 Applications Filed
- 1685 Patents Issued To-Date
- 82.04 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01J Class
- 0 % this patent is cited more than
- 9 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Sep 1, 2027 |