Microfabricated magnetic field transducer with flux guide
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United States of America Patent
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Mar 1, 2016
Grant Date -
Jan 29, 2015
app pub date -
Jul 29, 2013
filing date -
Jul 29, 2013
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Abstract
A microfabricated magnetic field transducer uses a magnetically sensitive structure in combination with one or more permeable magnetic flux guides. The flux guides may route off-axis components of an externally applied magnetic field across the sensitive axis of the magnetically sensitive structure, or may shield the magnetically sensitive structure from off-axis, stray fields or noise sources. A combination of flux guides and magnetically sensitive structures arranged on a single substrate may enable an integrated, 3-axis magnetometer in a single package, greatly improving cost and performance.
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