Scanning probe microscope comprising an isothermal actuator
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United States of America Patent
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Feb 23, 2016
Grant Date -
Feb 12, 2015
app pub date -
Aug 11, 2014
filing date -
Aug 9, 2013
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Abstract
A single-chip scanning probe microscope is disclosed, wherein the microscope includes an isothermal two-dimensional scanner and a cantilever that includes an integrated strain sensor and a probe tip. The scanner is operative for scanning a probe tip about a scanning region on a sample while the sensor measures tip-sample interaction forces. The scanner, cantilever, probe tip, and integrated sensor can be fabricated using the backend processes of a conventional CMOS fabrication process. In addition, the small size of the microscope system, as well as its isothermal operation, enable arrays of scanning probe microscopes to be integrated on a single substrate.
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