Thermal convection-type accelerometer
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United States of America Patent
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Feb 23, 2016
Grant Date -
May 30, 2013
app pub date -
Nov 26, 2012
filing date -
Nov 29, 2011
priority date (Note) -
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Abstract
A thermal convection-type accelerometer includes a first insulating substrate, a circuit formed on the first insulating substrate, a first acceleration-sensing device coupled with the circuit, and a first supporting layer attached on the insulating substrate. The first acceleration-sensing device includes two temperature-sensing components and a heater disposed between the temperature-sensing components. The temperature-sensing components and the heater are directly formed on the first supporting layer.
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