Miniaturized integrated micro electro-mechanical systems (MEMS) optical sensor array

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United States of America Patent

PATENT NO 9267923
APP PUB NO 20140147337A1
SERIAL NO

13882987

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This invention describes a method and apparatus for actuation and multiplexed sensing using an array of sensing elements. The invention can be used for label-free detection of biological and chemical agents in a robust, miniaturized package. The invention integrates photonics, CMOS electronics, and Micro/Nano system technologies and allows multi-analyte sensing in the same package. The preferred actuation method is using magnetic thin films and preferred sensing method is optical using interference means.

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KOC UNIVERSITESI34450 ISTANBUL

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Alaca, Burhanettin Erdem Istanbul, TR 3 9
Timurdogan, Erman Izmir, TR 30 256
Urey, Hakan Istanbul, TR 59 2454

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