Method for supplying sequential power impulses

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United States of America Patent

PATENT NO 9267200
APP PUB NO 20140190819A1
SERIAL NO

14112757

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Abstract

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The invention relates to a method for supplying power impulses for PVD sputtering cathodes subdivided into partial cathodes. In said method, the power impulse intervals acting on the partial cathodes are selected in such a way as to overlap, thereby dispensing with the need to interrupt the drawing of power supplied by the generator.

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Patent Owner(s)

Patent OwnerAddress
OERLIKON SURFACE SOLUTIONS AG TRÜBBACH120 KURDISH STREET CAPE TOWN SWITZERLAND

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Krassnitzer, Siegfried Feldkirch, AT 65 272
Lechthaler, Markus Feldkirch, AT 17 79
Lendi, Daniel Grabs, CH 8 107
Ruhm, Kurt Schaanwald, LI 4 26

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