Electromagnetic waveguide and plasma source

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United States of America Patent

PATENT NO 9265138
APP PUB NO 20140062299A1
SERIAL NO

13955193

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Abstract

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A method comprises: aligning a plasma torch within an iris cavity of an iris along a first axis between first and second iris slots having heights less than 70% of the diameter of the torch; and generating an electromagnetic field having field lines along a second axis. The field comprises a component that is substantially transverse to the first direction. An apparatus is also described.

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Patent Owner(s)

Patent OwnerAddress
AGILENT TECHNOLOGIES INC5301 STEVENS CREEK BLVD 1A-PB SANTA CLARA CA 95051

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hammer, Michael Ron Sassafras, AU 11 156
Pillans, John Melbourne, AU 1 2
Preuss, Thomas Erwin North Fitzroy, AU 1 2

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