Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator
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United States of America Patent
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Feb 16, 2016
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app pub date -
May 4, 2015
filing date -
Jun 18, 2005
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Abstract
The present invention provides methods and apparatus capable of routine placement and replacement of fabricator tools in a designated tool location. The tool location can be selected from multiple tool locations arranged in a matrix with horizontal and vertical designations. The operation may be fully automated. In another aspect, the invention describes Cleanspace fabricators which use devices to routinely remove and place tooling.
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