Alignment of an interferometer module for use in an exposure tool
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 16, 2016
Grant Date -
Oct 4, 2012
app pub date -
Mar 30, 2012
filing date -
Mar 30, 2011
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The invention relates to alignment of an interferometer module for use in an exposure tool. An alignment method is provided for aligning an interferometer to the tool while outside of the too. Furthermore, the invention provides a dual interferometer module, an alignment frame use in the alignment method, and an exposure tool provided with first mounting surfaces for cooperative engagement with second mounting surfaces of an interferometer module.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully