Ion source devices and methods
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Feb 9, 2016
Grant Date -
Feb 27, 2014
app pub date -
Aug 22, 2012
filing date -
Aug 22, 2012
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An ion source includes a chamber defining an interior cavity for ionization, an electron beam source at a first end of the interior cavity, an inlet for introducing ionizable gas into the chamber, and an arc slit for extracting ions from the chamber. The chamber includes an electrically conductive ceramic.
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
INFINEON TECHNOLOGIES AG | GERMAN BERG LAURA IBIZA NAUMBURG SAXONY-ANHALT |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Goerbing, Frank | Dresden, DE | 2 | 12 |
# of filed Patents : 2 Total Citations : 12 |
Cited Art Landscape
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Patent Citation Ranking
- 1 Citation Count
- H01J Class
- 20.76 % this patent is cited more than
- 9 Age
Forward Cite Landscape
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Aug 9, 2027 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

Legal Events
Date | Code | Event | Description |
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Jul 12, 2021 | FEPP | FEE PAYMENT PROCEDURE | free format text: SURCHARGE FOR LATE PAYMENT, SMALL ENTITY (ORIGINAL EVENT CODE: M2554); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY |
Jul 12, 2021 | MAFP | MAINTENANCE FEE PAYMENT | free format text: PAYMENT OF MAINTENANCE FEE, 4TH YR, SMALL ENTITY (ORIGINAL EVENT CODE: M2551); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY year of fee payment: 4 |
Jan 10, 2018 | PD | Priority Date | |
Jan 09, 2018 | I | Issuance | |
Dec 20, 2017 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
May 19, 2016 | P | Published | |
Oct 15, 2015 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SHEMWELL, DAVID MARK;VETTER, ALAN AUGUST;REEL/FRAME:036891/0574 Owner name: LASER GUIDANCE INC., WASHINGTON Effective Date: Oct 15, 2015 |
Oct 05, 2015 | F | Filing |

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