Ion source devices and methods

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United States of America Patent

PATENT NO 9257285
APP PUB NO 20140055024A1
SERIAL NO

13591291

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Abstract

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An ion source includes a chamber defining an interior cavity for ionization, an electron beam source at a first end of the interior cavity, an inlet for introducing ionizable gas into the chamber, and an arc slit for extracting ions from the chamber. The chamber includes an electrically conductive ceramic.

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Patent Owner(s)

Patent OwnerAddress
INFINEON TECHNOLOGIES AGGERMAN BERG LAURA IBIZA NAUMBURG SAXONY-ANHALT

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goerbing, Frank Dresden, DE 2 12

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  • 1 Citation Count
  • H01J Class
  • 20.76 % this patent is cited more than
  • 9 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges50115342306323221212363401 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +010020030040050060070080090010001100120013001400150016001700

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