Method for producing catalytic metal layer and method for producing graphene material

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United States of America Patent

PATENT NO 9254477
APP PUB NO 20140363363A1
SERIAL NO

14468663

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Abstract

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A rectangular substrate 12 composed of c-plane sapphire is prepared. Nickel serving as a catalytic metal is deposited on the entirety of an upper surface of the substrate 12 to form a catalytic metal film 14 (see (a)). The catalytic metal film 14 is patterned by a lithography method into a catalytic metal film 16 having a predetermined shape (see (b)). The temperature of the catalytic metal film 16 is raised to 1000° C. and maintained at 1000° C. for 20 minutes. The temperature of the catalytic metal film 16 is lowered from 1000° C. to 800° C. at a rate of 5° C./min. The temperature of the catalytic metal film 16 is maintained at 800° C. for 15 hours. Thereby, a catalytic metal layer 17 having large grains is provided (see (c)).

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Patent Owner(s)

Patent OwnerAddress
MEIJO UNIVERSITY1-501 SHIOGAMAGUCHI TEMPAKU-KU NAGOYA-SHI AICHI 468-8502

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Maruyama, Takahiro Nagoya, JP 74 485
Naritsuka, Shigeya Nagoya, JP 7 194

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