Fabry-perot interferometer with piezoelectric actuator contracting in radial direction on membrane

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United States of America Patent

PATENT NO 9250418
APP PUB NO 20120162664A1
SERIAL NO

13394209

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Abstract

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The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as mirror (1), the element being mechanically coupled to a frame (4) with a bendable coupling (2A), wherein actuator elements (3A, 3B) are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator.

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Patent Owner(s)

Patent OwnerAddress
SINTEF TTOPOSTBOKS 4764 TORGARDEN TRONDHEIM 7465

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bakke, Thor Lysaker, NO 12 121
Johansen, Ib-Rune Oslo, NO 47 1001
Tyholdt, Frode Oslo, NO 9 401
Vogl, Andreas Oslo, NO 20 134
Wang, Dag Thorstein Oslo, NO 13 338

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