Resonator assembly comprising a silicon resonator and a quartz resonator
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United States of America Patent
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Feb 2, 2016
Grant Date -
N/A
app pub date -
Apr 10, 2014
filing date -
Apr 12, 2013
priority date (Note) -
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Abstract
A resonator assembly comprising a semiconductor substrate, a resonator gyroscope, the resonator gyroscope including a first resonator formed in a layer of a first material, and an oscillator on the semiconductor substrate, the oscillator including a second resonator formed of a second material, wherein the second resonator is attached in a cavity; the cavity comprising a first recess in said layer of a first material and the edges of the first recess being attached to the substrate, or the cavity comprising a second recess in said substrate and the edges of the second recess being attached to said layer of a first material.
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International Classification(s)
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- H03B:GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUEN....
- B81C:PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE M....
- G01P:MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, D....
- G01C:MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING....
- H03H:IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONA....
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