Chemical bath deposition (CBD) apparatus
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United States of America Patent
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Feb 2, 2016
Grant Date -
Jun 20, 2013
app pub date -
Apr 23, 2012
filing date -
Dec 14, 2011
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Abstract
A chemical bath deposition (CBD) apparatus includes a first cap, a second cap, and a solution input/output device. The second cap is arranged corresponding to the first cap so as to form a deposition space. The solution input/output device is located in the first cap so as to feed a solution into/out of the deposition space. The position of the solution input/output device is fixed, or the solution input/output device is movable in the deposition space.
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