Semiconductor device and production method thereof

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United States of America Patent

PATENT NO 9245954
APP PUB NO 20130306985A1
SERIAL NO

13692101

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Abstract

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An aluminum material can be used on a surface of the electrode of a semiconductor element, this aluminum layer need not be formed thick unnecessarily, a copper wire is bonded strongly to the semiconductor element irrespective of a diameter of the wire, and high heat resistance can be achieved. Silicon carbide (SiC) is used as a substrate of the semiconductor element 10, the titanium layer 20 and the aluminum layer 21 are formed as the electrode 15 on the silicon carbide substrate, and by a ball bonding or a wedge bonding of the copper wire 16 to the aluminum layer 21 of the electrode 15 while applying ultrasonic wave, the copper-aluminum compound layer 23 (Al4Cu9, AlCu or the like) is formed between the copper wire 16 and the titanium layer 20.

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Patent Owner(s)

Patent OwnerAddress
NEW JAPAN RADIO CO LTD3-10 YOKOYAMA-CHO NIHONBASHI CHUO-KU TOKYO-TO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujii, Yoshio Tokyo, JP 66 944

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