Apparatus and methods for generating electromagnetic radiation

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United States of America Patent

PATENT NO 9245730
APP PUB NO 20150035436A1
SERIAL NO

14379470

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus for generating electromagnetic radiation includes an envelope, a vortex generator configured to generate a vortexing flow of liquid along an inside surface of the envelope, first and second electrodes within the envelope configured to generate a plasma arc therebetween, and an insulative housing associated surrounding at least a portion of an electrical connection to one of the electrodes. The apparatus further includes a shielding system configured to block electromagnetic radiation emitted by the arc to prevent the electromagnetic radiation from striking all inner surfaces of the insulative housing. The apparatus further includes a cooling system configured to cool the shielding system.

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Patent Owner(s)

Patent OwnerAddress
MATTSON TECHNOLOGY INC47131 BAYSIDE PARKWAY FREMONT CA 94538
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO LTDNO 8 BUILDING NO 28 JINGHAI ER RD ECONOMIC AND TECHNICAL DEVELOPMENT ZONE BEIJING 100176

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bumbulovic, Mladen Vancouver, CA 7 87
Camm, David Malcolm Vancouver, CA 20 466
Kamdar, Amar B Burnaby, CA 2 23
Lembesis, Peter Langley, CA 2 1

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