Systems and method for laser voltage imaging state mapping
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United States of America Patent
Stats
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Jan 26, 2016
Grant Date -
Oct 2, 2014
app pub date -
Jun 17, 2014
filing date -
May 1, 2009
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An apparatus and method for laser probing of a DUT is disclosed. The system enables laser voltage imaging state mapping of devices within the DUT. A selected area of the DUT is illuminating a while the DUT is receiving test signals causing certain of the active devices to modulate. Light reflected from the DUT is collected and is converted into an electrical signal. Phase information is extracting from the electrical signal and a two-dimensional image is generated from the phase information, wherein the two-dimensional image spatially correlates to the selected area.
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Patent Citation Ranking
- 5 Citation Count
- G01R Class
- 12.96 % this patent is cited more than
- 9 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jul 26, 2027 |
