Integrated diode array and corresponding manufacturing method
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United States of America Patent
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Jan 19, 2016
Grant Date -
Apr 10, 2014
app pub date -
Oct 9, 2013
filing date -
Oct 10, 2012
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Abstract
An integrated diode array and a corresponding manufacturing method are provided. The integrated diode array includes a substrate having an upper side, and a plurality of blocks of several diodes, which are positioned in a planar manner and are suspended at the substrate above a cavity situated below them in the substrate. The blocks are separated from one another by respective gaps, and within a specific block, the individual diodes are electrically insulated from one another by first STI trenches situated between them.
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