Device and method for creating Gaussian aberration-corrected electron beams

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United States of America Patent

PATENT NO 9240255
APP PUB NO 20140252228A1
SERIAL NO

14199947

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Abstract

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Electron beam phase gratings have phase profiles that produce a diffracted beam having a Gaussian or other selected intensity profile. Phase profiles can also be selected to correct or compensate electron lens aberrations. Typically, a low diffraction order produces a suitable phase profile, and other orders are discarded.

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Patent Owner(s)

Patent OwnerAddress
GOVERNMENT OF THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF COMMERCENATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY 100 BUREAU DRIVE MS 2200 GAITHERSBURG MD 20899
UNIVERSITY OF OREGONINNOVATION PARTNERSHIP SERVICES 1238 UNIVERSITY OF OREGON EUGENE OR 97403-1238

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Linck, Martin Heidelberg, DE 9 17
McMorran, Benjamin Eugene, US 2 18

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