Diffraction based overlay linearity testing
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United States of America Patent
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Jan 19, 2016
Grant Date -
Sep 29, 2011
app pub date -
Mar 22, 2011
filing date -
Mar 25, 2010
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Abstract
An empirical diffraction based overlay (eDBO) measurement of an overlay error is produced using diffraction signals from a plurality of diffraction based alignment pads from an alignment target. The linearity of the overlay error is tested using the same diffraction signals or a different set of diffraction signals from diffraction based alignment pads. Wavelengths that do not have a linear response to overlay error may be excluded from the measurement error.
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