High resolution object inspection apparatus using terahertz wave
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United States of America Patent
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Jan 19, 2016
Grant Date -
Feb 12, 2015
app pub date -
Apr 10, 2012
filing date -
Mar 14, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
An object inspection apparatus includes a terahertz wave supplying unit for generating a terahertz wave and moving a path of the terahertz wave according to time so that the terahertz wave is supplied to an object to be inspected, a focusing lens located between the terahertz wave supplying unit and the object to be inspected to focus the terahertz wave supplied by the terahertz wave supplying unit, a rotating plate having a plate shape and including a plurality of the focusing lenses with different distances from the center thereof, the rotating plate rotating in the circumferential direction so that one of the focusing lenses is located at a path of the terahertz wave according to the path movement of the terahertz wave, and a terahertz wave detecting unit for collecting and detecting a terahertz wave incident to the object to be inspected.
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