Method and device for applying or embedding particles onto or into a layer applied by plasma coating
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United States of America Patent
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Jan 19, 2016
Grant Date -
Sep 1, 2011
app pub date -
Oct 9, 2009
filing date -
Oct 30, 2008
priority date (Note) -
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Abstract
A method for applying or embedding nanoparticles or microparticles of any substance in a defined manner onto or into a layer to be applied to a substrate surface by plasma coating before, during or after the plasma coating operation in a magnetron or plasmatron. The particles are introduced from the outside into the vacuum chamber of the magnetron or plasmatron via at least one pressure stage. The particles are spatially distributed in the plasma space between the target and the substrate. The particles in the plasma space are preferably exposed to an electric field generating a movement of the particles toward the substrate. It is advantageous for this purpose if the particles are electrically charged before being introduced into the plasma space.
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