Clamping and contacting device for thin silicon rods
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United States of America Patent
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Jan 19, 2016
Grant Date -
May 31, 2012
app pub date -
Mar 29, 2010
filing date -
Mar 31, 2009
priority date (Note) -
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Abstract
A clamping and contacting device for mounting and electrically contacting thin silicon rods in silicon deposition reactors is disclosed, the clamping and contacting device having a rod holder for receiving one end of a thin silicon rod. The rod holder comprises at least three contact elements disposed around a receiving space for the thin silicon rod. Each of the contact elements forms a contact surface facing towards a receiving space for electrically and mechanically contacts the thin silicon rod, wherein the contact surfaces of adjacent contact elements are spaced apart.
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