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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
CARL ZEISS MICROSCOPY LLC	ONE ZEISS DRIVE THORNWOOD NY 10594

International Classification(s)

• H01J:ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
• B82Y:SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; ....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Aderhold, Dirk	Schwabsberg, DE	11	306
Edinger, Klaus	Lorsch, DE	35	425
Farkas,, III Louis S	Durham, US	24	787
Hill, Raymond	Rowley, US	53	1962
Mantz, Ulrich	Schelklingen, DE	22	301
Markwort, Lars	Haimhausen, DE	17	336
Notte,, IV John A	Gloucester, US	46	887
Percival, Randall G	Raymond, US	26	1311
Ward, Billy W	Boyce, US	46	1989

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Jul 12, 2027

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
January 12, 2016	US,9236225,B2   US9236225B2	GRANTED PATENT AS SECOND PUBLICATION
July 30, 2015	US,20150213997,A1   US20150213997A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 9236225

Ion sources, systems and methods

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