Microvalve with integrated flow sensing capability
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United States of America Patent
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Jan 12, 2016
Grant Date -
Aug 7, 2014
app pub date -
Dec 19, 2013
filing date -
Dec 27, 2012
priority date (Note) -
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Abstract
A system for controlling the flow of a fluid from a source to a load includes a source. An on/off type of control valve communicates with the source. A micro-electric mechanical system communicates with the on/off type of control valve. A consuming device communicates with the micro-electric mechanical system. An electronic controller that communicates with the consuming device and the source. The electronic controller measures a change in a parameter of the micro-electric mechanical system that results from the flow of fluid through the micro-electric mechanical system to sense a flow of fluid through a micro-electric mechanical system.
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