Imaging device and method for high-sensitivity optical scanning and integrated circuit therefor
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United States of America Patent
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Jan 5, 2016
Grant Date -
Dec 12, 2013
app pub date -
Aug 14, 2013
filing date -
Jun 22, 2001
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Abstract
An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
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