Printed circuit board multipole for ion focusing

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United States of America Patent

PATENT NO 9230789
APP PUB NO 20110220788A1
SERIAL NO

12931272

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Abstract

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An apparatus for focusing and for storage of ions and an apparatus for separation of a first pressure area from a second pressure area are disclosed, in particular for an analysis apparatus for ions. A particle beam device may have at least one of the abovementioned apparatuses. A container for holding ions and at least one multipole unit are provided. The multipole unit has a through-opening with a longitudinal axis as well as a multiplicity of electrodes. A first set of the electrodes is at a first radial distance from the longitudinal axis. A second set of the electrodes is in each case at a second radial distance from the longitudinal axis. The first radial distance is less than the second radial distance. Alternatively or additionally, the apparatus may have an elongated opening with a radial extent. The opening has a longitudinal extent which is greater than the radial extent.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS MICROSCOPY GMBHCARL-ZEISS-PROMENADE 10 JENA 07745

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aliman, Michel Oberkochen, DE 19 119
Dömer, Holger Bopfingen, DE 3 11
Glasmachers, Albrecht Wetter, DE 5 23
Hendrich, Christian Aalen, DE 12 95
Laue, Alexander Essen, DE 10 27
Mantz, Hubert Neu-Ulm, DE 10 66
Preikszas, Dirk Oberkochen, DE 43 372
Zeile, Ulrike Heidenheim, DE 15 246

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