Transfer device and transfer method
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United States of America Patent
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Jan 5, 2016
Grant Date -
Jan 15, 2015
app pub date -
Sep 29, 2014
filing date -
Mar 30, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
A transfer device includes: a transfer unit configured to transfer a substrate from a transfer original position to a corrected transfer destination position; a plurality of position detecting units installed between the transfer original position and the corrected transfer destination position and configured to detect a position of the substrate which is being transferred by the transfer unit; and a control unit configured to calculate the corrected transfer destination position by correcting an initial transfer destination position set at the start of the transfer of the substrate, based on the position of the substrate detected by the position detecting units, before the substrate is transferred to the initial transfer destination position, and configured to control the transfer unit to transfer the substrate to the corrected transfer destination position along a transfer path produced by modifying an initial transfer path.
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