Substrate cartridge, substrate-processing apparatus, substrate-processing system, substrate-processing method, control apparatus, and method of manufacturing display element

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United States of America Patent

PATENT NO 9224964
APP PUB NO 20120215338A1
SERIAL NO

13461523

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Abstract

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A substrate cartridge includes a cartridge main body that houses a substrate and an information-maintaining section that is housed in the cartridge main body and maintains information that includes at least specification information of specification values of the substrate housed in the cartridge main body.

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Patent Owner(s)

  • NIKON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Inoue, Hideya Yokohama, JP 93 1806

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