Semiconductor optical element array and method of manufacturing the same
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United States of America Patent
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Dec 29, 2015
Grant Date -
Jul 14, 2011
app pub date -
Aug 27, 2009
filing date -
Sep 1, 2008
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Abstract
The present invention provides a semiconductor optical element array including: a semiconductor substrate having a main surface in which a plurality of concave portions is formed; a mask pattern that is formed on the main surface of the semiconductor substrate and includes a plurality of opening portions provided immediately above the plurality of concave portions; a plurality of fine columnar crystals that is made of a group-III nitride semiconductor grown from the plurality of concave portions to the upper side of the mask pattern through the plurality of opening portions; an active layer that is grown on each of the plurality of fine columnar crystals; and a semiconductor layer covering each of the active layers.
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