Microprobe, recording apparatus, and method of manufacturing microprobe
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United States of America Patent
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Dec 29, 2015
Grant Date -
Mar 15, 2012
app pub date -
Mar 25, 2011
filing date -
Sep 10, 2010
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Abstract
According to one embodiment, a microprobe includes a supporting base, an insulating layer, and an electrode layer arrayed in a first direction in this order. A principal surface of the microprobe is formed in a second direction different from the first direction. A step is formed on at least the electrode layer on the principal surface, and the electrode layer is partitioned into a first area and a second area by the step.
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