Vertical probe card and method for manufacturing the same
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United States of America Patent
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Dec 29, 2015
Grant Date -
N/A
app pub date -
Jul 29, 2014
filing date -
Jul 29, 2014
priority date (Note) -
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Abstract
A vertical probe card includes a bottom substrate, a top substrate, an interposer, a first set of electrically conductive polymer contacts, a second set of electrically conductive polymer contacts, a first anisotropic conductive film, and a second anisotropic conductive film. The interposer is disposed between the bottom substrate and the top substrate. The first set of electrically conductive polymer contacts is disposed on the surface of the bottom substrate opposite to the interposer. The second set of electrically conductive polymer contacts is disposed on the surface of the top substrate opposite to the interposer. The first set of electrically conductive polymer contacts are arranged differently from the second set of electrically conductive polymer contacts. The first anisotropic conductive film is disposed between the bottom substrate and the interposer, and configured to electrically connect the bottom substrate and the interposer. The second anisotropic conductive film is disposed between the interposer and the top substrate, and configured to electrically connect the interposer and the top substrate.
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