Reactor apparatus and methods for reacting compounds

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United States of America Patent

PATENT NO 9222733
SERIAL NO

13355309

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Abstract

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Shell and tube heat exchangers that include a baffle arrangement that improves the temperature profile and flow pattern throughout the exchanger and/or that are integral with a reaction vessel are disclosed. Methods for using the exchangers including methods that involve use of the exchanger and a reaction vessel to produce a reaction product gas containing trichlorosilane are also disclosed.

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Patent Owner(s)

Patent OwnerAddress
GLOBALWAFERS CO LTDNO 8 INDUSTRIAL EAST ROAD 2 SCIENCE-BASED INDUSTRIAL PARK HSINCHU

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bovo, Rodolfo Merano, IT 7 14
Fumagalli, Matteo Merano, IT 13 29
Pazzaglia, Gianluca Merano, IT 7 13

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