Plasma generating apparatus and plasma generating method
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United States of America Patent
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Dec 22, 2015
Grant Date -
Sep 13, 2012
app pub date -
Feb 13, 2012
filing date -
Mar 9, 2011
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Abstract
Generated amount of active species is increased, and dew formation or moisture attachment hardly occurs on a dielectric layer. A plasma generating apparatus including a pair of electrodes, wherein a dielectric layer is arranged on at least one of surfaces of the electrodes facing each other, plasma discharge occurs as a predetermined voltage is applied to the electrodes, and a coating film is arranged on a surface of the dielectric layer.
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