Charged particle beam system and method of operating a charged particle beam system
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United States of America Patent
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Dec 22, 2015
Grant Date -
Jan 8, 2015
app pub date -
Jun 25, 2014
filing date -
Jul 8, 2013
priority date (Note) -
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Abstract
The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10−5 per incident neon ion.
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