Optical waveguide arrangements comprising an auxiliary waveguide-like structure
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United States of America Patent
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Dec 22, 2015
Grant Date -
Aug 29, 2013
app pub date -
Nov 11, 2011
filing date -
Dec 1, 2010
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Abstract
An optical waveguide arrangement is provided which comprises an active ridge waveguide structure 12 formed by etching of a semiconductor substrate 1, 2, 3. There is also provided an auxiliary waveguide-like structure 8 formed on the substrate adjacent the active ridge waveguide structure 12 to control the etched profile of the active waveguide structure. The arrangement of the auxiliary structure 8 on the substrate controls the etched profile over the cross-section of the active waveguide structure 12 and along the length of the active waveguide structure 12. Advantageously, this arrangement reduces or eliminates the disadvantages associated with etch-process induced asymmetries in the shape of closely spaced waveguides.
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