Apparatus for treating substrate by applying chemical solution on substrate using plural rollers
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United States of America Patent
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Dec 15, 2015
Grant Date -
Jan 24, 2013
app pub date -
Jul 20, 2012
filing date -
Jul 20, 2011
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Abstract
An apparatus for treating a substrate including a plurality of transfer rollers configured to transfer a substrate and simultaneously to be rotated to wet a back surface of the substrate; a plurality of chemical solution supply tanks configured to receive the chemical solution therein, the plurality of the chemical solution supply tanks arranged under the plurality of the transfer rollers, respectively, with being spaced apart a predetermined distance from each other; a main tank configured to surround the plurality of the chemical solution supply tanks; and an exhaustion unit configured to suck and exhaust fume generated in the process of wetting the back surface with the chemical solution and liquid drops of the chemical solution.
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