Coil section assembly for simulating circular coils for vacuum devices
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United States of America Patent
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Dec 8, 2015
Grant Date -
Nov 8, 2012
app pub date -
Oct 5, 2010
filing date -
Nov 20, 2009
priority date (Note) -
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Abstract
The invention relates to a vacuum treatment chamber, comprising a coil arrangement for generating a magnetic field in the chamber, wherein the coil arrangement comprises at least one first coil section and a second coil section, wherein the first coil section and the second coil section are arranged adjacent to each other in cross-section and preferably in one plane, such that at least a partial section of the first coil substantially follows the course of a partial section of the second coil, wherein the spacing of the first partial section from the second partial section is at least one order of magnitude smaller than the cross-section of the optionally smaller coil section.
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