Ion generation method and ion source
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United States of America Patent
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Dec 8, 2015
Grant Date -
Mar 6, 2014
app pub date -
Aug 27, 2013
filing date -
Aug 28, 2012
priority date (Note) -
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Abstract
An ion generation method uses a direct current discharge ion source provided with an arc chamber formed of a high melting point material, and includes: generating ions by causing molecules of a source gas to collide with thermoelectrons in the arc chamber and producing plasma discharge; and causing radicals generated in generating ions to react with a liner provided to cover an inner wall of the arc chamber at least partially. The liner is formed of a material more reactive to radicals generated as the source gas is dissociated than the material of the arc chamber.
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