Image forming optical system, imaging apparatus, profile measuring apparatus, structure manufacturing system and structure manufacturing method

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United States of America Patent

PATENT NO 9205576
APP PUB NO 20130202727A1
SERIAL NO

13760745

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Abstract

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There is provided a measuring apparatus including: an imaging optical system configured to form an image of an object to be measured; and an imaging section including a transmissive member which is arranged in the vicinity of an image plane of the imaging optical system to be inclined with respect an optical axis of the imaging optical system. The imaging optical system includes a first optical member which is non-coaxial with respect to the optical axis.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION1-5-20 NISHIOI SHINAGAWA-KU TOKYO 140-8601
NIKON METROLOGY NV3001 LEUVEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Blanckaert, Patrick Boortmeerbeek, BE 4 18
Kitazawa, Daisuke Chigasaki, JP 33 664

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