Cascaded micromechanical actuator structure

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United States of America Patent

PATENT NO 9195054
APP PUB NO 20110248601A1
SERIAL NO

13124468

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Abstract

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A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis.

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Patent Owner(s)

Patent OwnerAddress
ROBERT BOSCH GMBHSTUTTGART GERMANY STUTTGART BADEN-WURTTEMBERG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Friese, Christoph Reutlingen, DE 17 83
Fritz, Joachim Tuebingen, DE 14 40
Muchow, Joerg Reutlingen, DE 62 345
Pinter, Stefan Reutlingen, DE 86 717
Pirk, Tjalf Stuttgart, DE 42 509

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