Capacitive pressure sensor with reduced parasitic capacitance
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United States of America Patent
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Nov 24, 2015
Grant Date -
Sep 18, 2014
app pub date -
Mar 14, 2013
filing date -
Mar 14, 2013
priority date (Note) -
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Abstract
System, apparatus and method for capacitive sensing, where a sensor includes an upper and lower housing, each respectively equipped with upper and lower pressure ports. The lower housing is electrically coupled to an active shield. An insulating material is provided on or near a conductive diaphragm for insulating the conductive diaphragm from the lower housing. The insulating material may be an insulator or a dielectric material, where a sensing electrode is positioned such that the sensing electrode extends laterally across at least a portion of the insulating material, and is separated from the insulating material by a predetermined distance to form an air gap.
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