Target supply apparatus, control system, control apparatus and control circuit thereof
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United States of America Patent
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Nov 17, 2015
Grant Date -
Feb 6, 2014
app pub date -
Oct 7, 2013
filing date -
Dec 24, 2008
priority date (Note) -
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Abstract
A target supply apparatus includes a tank for storing a liquid target material, a nozzle for outputting the liquid target material in the tank, and a gas supply source for supplying gas into the tank, and controls a gas pressure inside the tank with a pressure of the gas supplied from the gas supply source which is provided with a pressure regulator. The target supply apparatus also includes a pressure-decrease gas passage of which one end is connected to the tank and the other end forms an exhaust port, a pressure-decrease valve provided on the pressure-decrease gas passage, and a controller for controlling open/close of the pressure-decrease valve. The controller, when the target material is caused not to output from the nozzle, opens the pressure-decrease valve and decreases the pressure inside the tank.
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