Thin film thermoelectric devices having favorable crystal tilt
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United States of America Patent
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Nov 17, 2015
Grant Date -
May 8, 2014
app pub date -
Mar 15, 2013
filing date -
Nov 6, 2012
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Abstract
A method of fabricating a thermoelectric device includes providing a substrate having a plurality of inclined growth surfaces protruding from a surface thereof. Respective thermoelectric material layers are grown on the inclined growth surfaces, and the respective thermoelectric material layers coalesce to collectively define a continuous thermoelectric film. A surface of the thermoelectric film opposite the surface of the substrate may be substantially planar, and a crystallographic orientation of the thermoelectric film may be tilted at an angle of about 45 degrees or less relative to a direction along a thickness thereof. Related devices and fabrication methods are also discussed.
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