Extremely low temperature rotary union
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Nov 17, 2015
Grant Date -
Jan 31, 2013
app pub date -
Jul 27, 2011
filing date -
Jul 27, 2011
priority date (Note) -
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Abstract
A chuck assembly has a wafer chuck attached to a shaft that has a passage defined therewithin. The chuck assembly also has a seal module that has a rotatable assembly and a fixed assembly. The rotatable assembly is disposed around and anchored to the shaft and has a spacer, a rotatable collar, a rotatable diaphragm, and a rotatable seal ring connected to the rotatable collar through the diaphragm with a leak-tight seal. The fixed assembly is disposed around the spacer and has a fixed collar and a fixed seal ring that is sealed to the fixed collar with a leak-tight seal. The fixed collar has a passage defined therewithin that has an opening that connects through the spacer to the passage defined within the shaft. The chuck assembly further includes a housing, to which the fixed assembly is fastened, that may be affixed to a base.
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